| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanical switch in which reliability can be improved, and suppression of variations in movement is enabled. SOLUTION: This mechanical switch is provided with the upper part control electrode 8 which is arranged so as to be opposed separated at a prescribed distance against the lower part control electrode 2, and which moves toward a silicon substrate 1 side by means of a static electricity generated between the lower part control electrode 2, a contact electrode 6 which is arranged so as to be opposed separated at a prescribed distance against a signal wire 4, which is coupled with the upper part control electrode 8, and which is contacted with the signal wire 4 by moving together with the upper part control electrode 8 toward a silicon substrate 1 side, and a part 10a of a SiOC membrane 10 which couples a silicon substrate 1 and the upper part control electrode 8, and which has a lower modulus than that of the upper part control electrode 8. COPYRIGHT: (C)2007,JPO&INPIT
|
