| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost, environment-resistant, compact, and high-flexibility inspection apparatus, capable of measuring the optical performance at the center of an optical axis and a desired image height. SOLUTION: The inspection apparatus 1 has a measuring optical system 2, comprising a white light source 3; a slit plate 4; and a detection device 10 for irradiating a light beam, which has been radiated from the white light source 3 and emergent from the slit plate 4, to an imaging lens to be inspected 5 and detecting the light beam transmitted through the imaging lens to be inspected 5. The slit plate 4 is constituted of a pinhole 4a for on-axis inspection, arranged in such a way as to coincide with the optical axis of the imaging lens to be inspected 5 and three pinhole 4b or more for off-axis inspection, located in the sample plane as the pinhole 4a and arranged on a circumference centering on the pinhole 4a. The detection apparatus 10 is constituted of a detection device 10a for on-axis images for detecting the images of the pinhole 4a for on-axis inspection and three detection devices 10b or more for off-axis images for detecting the corresponding images of the pinholes 4b for off-axis inspection. COPYRIGHT: (C)2007,JPO&INPIT
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