| 摘要 |
A method for detecting a teaching state of a substrate is provided to monitor the teaching state by measuring a temperature variation of heating zones and comparing the measured temperature with a temperature of a database. A substrate is loaded on a heating plate(210) consisting of plural heating zones. A temperature variation of the heating zones is measured while heating the heating plate using the heating zones. A database is constructed by using the measured temperature. The substrate is loaded on the heating plate at an actual process, and then the heating plate is heated by using the heating zones. At least one of the heating zones is selected and measured, and then the measured temperature is compared with the temperature of the database.
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