SHARPENED CARBON NANOTUBE AND ELECTRON SOURCE USING IT

摘要

PROBLEM TO BE SOLVED: To acquire a distinct observation image by enhancing the field intensity of the electron source of an electron microscope.

SOLUTION: This electron microscope has an electron emitting negative electrode having a carbon nanotube, and an extraction device to cause field emission of an electron, and uses the carbon nanotube having an acute angle portion in an almost conic form at its tip part. A manufacturing method having a process to heat-treat the carbon nanotube having the acute angle portion by leaving it so as to stand still on the temperature side lower and higher than a phase transition temperature is used.

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