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经营范围
发明名称
Verfahren zur Herstellung eines geklebten Substrates
摘要
申请公布号
DE69835469(T2)
申请公布日期
2007.09.20
申请号
DE19986035469T
申请日期
1998.01.08
申请人
SHIN-ETSU HANDOTAI CO. LTD.
发明人
TAKEI, TOKIO;NAKAMURA, SUSUMU;NAKAZAWA, KAZUSHI
分类号
H01L21/02;H01L21/304;H01L21/762;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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