发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a protective coating for a semiconductor device or the like which generates a reduced amount of a volatile component when heated at a lower temperature than a conventional temperature, e.g., at 200&deg;C. <P>SOLUTION: A photosensitive resin composition is used which contains polyamide and an isocyanuric acid derivative having photopolymerizable unsaturated bonds represented by formula (3) as essential components. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007241195(A) 申请公布日期 2007.09.20
申请号 JP20060067464 申请日期 2006.03.13
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 DOI ICHIRO;MATSUDA HIDEKI;SEO ATSUSHI;ANZAI NOBUHIRO
分类号 G03F7/027;C08F290/14;H01L21/027 主分类号 G03F7/027
代理机构 代理人
主权项
地址