发明名称 VIBRATION DETECTION SENSOR, VIBRATION ISOLATION DEVICE, AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration detection sensor capable of highly accurately detecting a position, a speed, and acceleration without complicating a configuration. <P>SOLUTION: The vibration sensor comprises a pendulum 2; a capacitor 3c for detecting a displacement of the pendulum 2; a main coil 9 arranged in a magnetic circuit, for generating thrust substantially maintaining the pendulum 2 at a stationary state; and a sub-coil 10 arranged in the magnetic circuit, for producing a signal corresponding to the speed of the pendulum 2. The sensor drives the main coil 9 by employing the signal from the sub-coil 10, and products three signals Sd, Sv, Sa corresponding to the position, the speed, and the acceleration of the pendulum 2, based on a signal obtained from the capacitor 3c, a driving current in the main coil 9, and a detection signal of the sub-coil 10. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007240396(A) 申请公布日期 2007.09.20
申请号 JP20060065204 申请日期 2006.03.10
申请人 TOKYO UNIV OF AGRICULTURE & TECHNOLOGY;NIKON CORP 发明人 WAKUI SHINJI;TAKAHASHI MASATO
分类号 G01H11/02;F16F9/04;F16F15/02;F16F15/023;H01L21/027 主分类号 G01H11/02
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