| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably develop an ink-repellent agent added to a resist on a surface. <P>SOLUTION: A spin-less system has been recently employed instead of the conventional spinner system to meet the increased scale of a substrate in a coating step in manufacturing a resin black matrix. In the coating method of the present invention, processes from supplying to injecting photosensitive resists with the ink-repelling agent added thereto and having different drying rates are carried out in two passages so as to apply a photosensitive resist having a fast drying rate on the surface of a coating film applied on a glass substrate and to apply a resist having a slow drying rate on the opposite side of the substrate, so that in a drying process after coating, the ink-repelling agent appearing on the coating film surface while the solvent is dried is stabilized. Further, since the solvent content in the coating film does not completely vaporize in a developing step, the resist has developing property almost equal to the conventional resist and can give a stable resin black matrix. <P>COPYRIGHT: (C)2007,JPO&INPIT |
