发明名称 |
WAFER-LEVEL TESTING OF LIGHT-EMITTING RESONANT STRUCTURES |
摘要 |
<p>A device for testing a light-emitting resonant structure on a wafer includes a vacuum chamber for holding the resonant structure; a source of charged particles; a electromagnetic radiation detector; a positioning mechanism constructed and adapted control the position of the wafer within the vacuum chamber; and a controller operatively connected to said source of electrons and to said detector and to said positioning mechanism. A voltage source may be provided.</p> |
申请公布号 |
WO2007106107(A2) |
申请公布日期 |
2007.09.20 |
申请号 |
WO2006US22689 |
申请日期 |
2006.06.09 |
申请人 |
VIRGIN ISLANDS MICROSYSTEMS, INC. |
发明人 |
GORRELL, JONATHAN |
分类号 |
H01J37/256 |
主分类号 |
H01J37/256 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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