| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device and a positioning method for a plate-like member which effectively prevents the false recognition of the edge of the plate-like member such as a semiconductor wafer, for precise positioning. SOLUTION: Light is projected from a point light source 5 to a wafer W on a table 1. The edge of the wafer W is detected when a sensor 6 receives the light in a light quantity stable area A for the light. Based on detection data for the edge, a reference is calculated for representing a crystal orientation and the center of the wafer W. Based on the calculation result, the wafer W is positioned. COPYRIGHT: (C)2007,JPO&INPIT |
