| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of avoiding damage caused by a pressure difference. SOLUTION: A movable part 12 having a comb-shaped irregular part 12a is vibrated at a resonance angular frequencyω<SB>0</SB>with respect to a fixed part 11 having a comb-shaped irregular part 11a, by electrostatic force. An admittance value ¾Y<SB>0</SB>¾ at the resonance angular frequencyω<SB>0</SB>is varied therein by viscosity of air acting as mechanical resistance. Pressure is measured based on the detected admittance value ¾Y<SB>0</SB>¾, as a result thereof. A viscosity detecting part is formed further in the movable part 12, separately from the comb-shaped irregular parts 11a, 12a, to measure precisely the pressure. COPYRIGHT: (C)2007,JPO&INPIT
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