SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate cleaning apparatus capable of efficiently and certainly removing an organic matter adhering to a substrate without using a chemical. SOLUTION: The substrate cleaning apparatus is comprised of a transfer means 1 for transferring a substrate, an ejection nozzle 1 for ejecting heated steam onto the surface of the substrate being transferred to which an organic matter adheres, and a shower device 6 for applying a physical force onto the organic matter adhering to the substrate being transferred. COPYRIGHT: (C)2007,JPO&INPIT