A METHOD AND APPARATUS FOR CONTROLLING A BALANCE OF A SUBSTRATE BY TORQUE CONTROL

摘要

A method and an apparatus for controlling balance of a substrate using torque control is provided to decrease an aligning error of a stamp and a substrate by controlling torque of a motor. A stamp(2) with a pattern to be transferred is fixed by an upper support(1) using vacuum pressure. A substrate support(4) is installed at a position opposite to the upper support to fix a substrate(3) with vacuum pressure. The substrate support is supported by a lower support(7), and a tilting member(5) is interposed between the substrate support and the lower support to tilt the substrate support forwardly on the lower support. The lower support is moved by a motor(8). A vacuum port(6) is formed on the lower support, and the tilting member is positioned on the tilting member.