APPARATUS OF UNLOADING A SUBSTRATE AND METHOD OF UNLOADING THE SAME

摘要

An apparatus and method for unloading a substrate is provided to improve the productivity of a substrate for a display device by reducing a defective in a substrate unloading process and to use electricity generating unit. A substrate is loaded on a stage(100), and a pin(110) is engaged to the stage, and protrudes towards the substrate in response to a control signal from an external. An electrostatic potential sensor(200) is located on the substrate to detect a potential of the substrate. A controller(300) generates a potential signal to the stage in response to a potential sensing signal output from the electrostatic potential sensor. An electricity generating unit(120) is engaged to the stage to generate static electricity in response to the potential signal.