发明名称 A conveyance apparatus having an improved compact conveying mechanism
摘要 <p>A conveyance apparatus includes an extendable and retractable mechanism, which includes a plurality of linked member pairs rotatably coupled across each other horizontally in a predetermined direction in pantograph form, a multiple-layer slider, which includes a carrier slider to hold a work product and fixed at one end of the extendable mechanism and at least one movable slider to move in a predetermined direction keeping a predetermined relative position to the carrier slider, and a drive mechanism configured to cause the linked member pairs to expand by changing a relative angle of the crossing linked member pairs.</p>
申请公布号 EP1835532(A1) 申请公布日期 2007.09.19
申请号 EP20070103586 申请日期 2007.03.06
申请人 RICOH COMPANY, LTD. 发明人 MURAYAMA, NOBORU
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
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