| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic membrane for gas separation with superior quality, suppressing occurrence of pin holes caused by defect present in an intermediate layer, thus having a high permeation factor ratio even in an increased size of the membrane. SOLUTION: In this manufacturing method of a ceramic membrane for gas separation, material gas containing vaporized organic silica compounds is supplied to a side forming the gas separation membrane of a base material, opposite gas is supplied to the opposite side of the material gas supply side of the base material, and the gas separation membrane consisting of silica oxide is formed on the surface of the base material supplied with the material gas. The material gas, while being heated and pressurized, is supplied to the surface of the base material. COPYRIGHT: (C)2007,JPO&INPIT
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