Magnetic Thin Film For High Frequency, and Method of Manufacturing Same, and Magnetic Device

摘要

A multilayer film ( 1 ) is formed by alternately layering a Co-based amorphous alloy layer ( 2 ) and a natural-oxidation layer ( 3 ) of the Co-based amorphous alloy ( 2 ) on a substrate ( 4 ). A magnetic thin film for high frequencies and a magnetic device which can be used in high frequency regions of the GHz band are obtained by making a volume ratio of the natural-oxidation layer ( 3 ) to the whole multilayer film ( 1 ) fall within a range of 5 to 50%. A magnetic thin film for high frequencies is also obtainable by forming a multilayer film ( 1 ) by alternately layering the Co-based amorphous alloy layer ( 2 ) having such a characteristic that a direction of magnetic field applied in a film formation process comes to be a direction of an easy magnetization axis of the Co-based amorphous alloy layer and a natural-oxidation layer ( 3 ) of the Co-based amorphous alloy, so that the easy magnetization axis of thus formed multilayer film ( 1 ) may be perpendicular to the direction of magnetic field applied in the film formation process of the multilayer film ( 1 ).