| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning apparatus for vacuum wherein the reduction of its positioning accuracy can be suppressed which is caused by the pressure difference between the outside and inside of a vacuum chamber. <P>SOLUTION: The positioning apparatus has an atmospheric-pressure reducing mechanism 11 between a vacuum chamber 1 and a barrier 6b, wherein the barrier 6b is coupled air-tightly to an outer-wall surface 1a of the vacuum chamber 1 via a bellows-like sealing member 8, and the mechanism cancels the effect of the unbalancing portion of a force caused by the pressure difference between the atmospheric pressure and the inside pressure of the vacuum chamber 1, and acting vertically via the barrier 6b surrounded by the constituents of the mechanism. <P>COPYRIGHT: (C)2007,JPO&INPIT |
