| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for producing a polymer film without being limited by the form of an object on which the film is formed and also having a good film-forming efficiency, and a method for producing a polyparaxylylene film. SOLUTION: This polymer film is produced by vaporizing a solid raw material in a gasifying oven 1 in the device for producing the polymer film 4, decomposing the gas in a decomposition oven 2 to make a monomer raw material, feeding the raw material to a film-forming chamber 3 and forming the polymer film on the object for forming the film at its inside. At this time, the residual monomer raw material discharged from the film-forming chamber is circulated to the decomposition oven 2 by a joining part 19 and circulation pump 5. Thereby, since the residual monomer raw material is reused for the film formation, a film-forming efficiency can be improved. The above device for forming the polymer film 40 can be suitably used especially for the film formation of polyparaxylylene film. COPYRIGHT: (C)2007,JPO&INPIT
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