Integrated micro fuel cell apparatus

摘要

A micro fuel cell and method of forming such includes depositing multiple layers ( 22 ) of alternating metals over a substrate ( 12 ); etching at least one metal from the multiple layers ( 22 ) creating a void between the remaining layers; forming a plurality of pedestals ( 28 ) in the multiple layers ( 22 ), each pedestal ( 28 ) having a center anode ( 29 ) portion and a concentric cathode ( 31 ) portion separated by a concentric cavity ( 31 ); filling the concentric cavity ( 31 ) with an electrolyte; and capping the center anode ( 29 ) portion and the concentric cavity ( 31 ).