| 摘要 |
<p>Probes (4a, 4b) having uneven portions at the leading ends are brought into contact with an electrode (P) of a device (D), i.e., an object to be inspected, with a prescribed needle pressure, and an insulating film (O) on the electrode (P) is mechanically damaged. Thus, an electrical resistance between the electrode (P) and the probes (4a, 4b) is permitted to be a first prescribed value or less. Then, the insulating film (O) on the electrode (P) is electrically damaged by fritting, and the electrical resistance value between the electrode (P) and the probes (4a, 4b) is permitted to be a second prescribed value which is not more than the first prescribed value.</p> |
