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发明名称
Elektrostatisches Halteelement
摘要
申请公布号
DE10240356(B4)
申请公布日期
2007.08.30
申请号
DE20021040356
申请日期
2002.08.27
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
KALKOWSKI, GERHARD;RISSE, STEFAN
分类号
H01L21/68;G03F7/20;H01L21/683
主分类号
H01L21/68
代理机构
代理人
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地址
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