| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser cutting processing method which can cut from a workpiece a master carrier for magnetic transfer comprising satisfactory cutting surface quality. <P>SOLUTION: Cutting processing is performed by arranging a workpiece in a vacuum chamber and irradiating the top surface of the workpiece with a laser beam from a laser source through a window set up in the vacuum chamber, in a state where pressure in the vacuum chamber is decompressed below to pressure at a triple point of the material constituting the workpiece when performing cutting processing of this workpiece. In this case, when the material is nickel, pressure in the vacuum chamber is decompressed below to 8.0×10<SP>-3</SP>(Torr), and when the material is aluminum, it is decompressed below to 1.2×10<SP>-8</SP>(Torr). <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
