| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus making an orbital state of an ion beam in a direction Y to be a required one without changing energy of the ion beam. <P>SOLUTION: The ion beam radiating apparatus is provided on an upstream side of a target and is provided with an electric field lens 20a with an entrance electrode 22, an intermediate electrode 24 and an exit electrode 26. The intermediate electrode 24 is provided with projecting surfaces 40 and 42 curved in the direction Y on surfaces which are on an upstream side and a downstream side in a proceeding direction of the ion beam 4. The entrance electrode 22 and the exit electrode 26 are provided with recessed surfaces 38 and 44 along the projecting surface on the surface facing the projecting surfaces of the intermediate electrode 24. The entrance electrode 22 and the exit electrode 26 are each maintained at a same potential to each other. The intermediate electrode 24 is maintained at the potential which is a different potential from the entrance electrode 22 and the exit electrode 26 and the potential making the orbital state of the ion beam 4 conducted from an electric field lens 20a in the direction Y to be a required one. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
