| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which improves a degree of freedom in the design of a blowout hole, is capable of adjusting a temperature reduction speed in each part of a heater without requiring any adjustment valve because of the design of the blowout hole, simplifies a duct structure, and can attain facilitation of sealing and cost reduction. SOLUTION: The heat treatment apparatus comprises: a treatment vessel 2 for housing objects (w) to be treated over multiple stages and performing predetermined heat treatment thereon, a tubular heater 3 for heating the objects (w) to be treated while covering the outer circumference of the treatment vessel 2, a heat exhaustion system 25 for exhausting the atmosphere within a space 24 between the heater 3 and the treatment vessel 2, and a cooling means 26 for cooling the space 24 by blowing a cooling fluid therein. The heater 3 is configured by disposing a heating resistor 18 on the inner circumference of a tubular heat insulator 17, and covering the outer circumference of the heat insulator 17 with outer coating 20; and the cooling means 26 includes a single or multiple annular ducts 28 formed in a height direction between the heat insulator 17 and the outer coating 20, and a blowout hole 29 provided in the heat insulator 17 to blow out the cooling fluid from each annular duct 28 toward or obliquely to the center of the heat insulator 17. COPYRIGHT: (C)2007,JPO&INPIT |
