| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deterioration of a packing sandwiched between a damper case and a radiator case. SOLUTION: An exhaust hood 70, an exhaust duct 76, a damper case 90, and a radiator case 100 are connected with a cooling air passage 61 which is formed between a process tube 11 of a batch-type hot wall shaped CVD equipment 10, and a heating unit 40 surrounding the process tube 11; and a packing 99 is sandwiched between the damper case 90 and the radiator case 100. An inside circumferential surface on an exhaust route side is covered with a protection cover 97, thereby preventing the packing 99 from deteriorating due to the heated cooled-air. Locating a drop preventing cover 98 around the outer circumference of the packing 99 allows the dropping of packing 99 in operating to prevent when connecting the damper case 90 and the radiator case 100 sandwiching the packing 99. The operation of connecting them can be easily and exactly carried out. COPYRIGHT: (C)2007,JPO&INPIT
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