| 摘要 |
PROBLEM TO BE SOLVED: To measure small amounts of siloxane components and make quantitative work efficient by imparting selectivity. SOLUTION: Metastable helium acquired by a direct-current glow discharge is used to ionize dopant gas, and Penning gas into a space isolated from a discharge part. By using their plasma to improve the efficiency of ionization of the components to be measured, a large ion current is acquired. Furthermore, through the selection of the dopant gas and Penning gas, selectivity can be imparted, enabling measurements of trace amounts of siloxane components. COPYRIGHT: (C)2007,JPO&INPIT
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