| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring apparatus capable of improving the accuracy of the measurement of a surface shape by reducing the blurring of a Z-axis driving section for lifting up and down a probe. SOLUTION: The shape measuring apparatus can two-dimensionally move the tips of styluses 11 and 21 along the optical surface of an optical element OE mounted in a tool HD for measurement. In other words, by applying a required arithmetic processing to the XY coordinate of a mounting stand 82a obtained using laser interferometers 83d and 83e and the Z coordinate of the stylus 11 obtained using a laser interferometer 91b while they are associated with each other by a controller 99, the three-dimensional surface shape of the optical surface of the optical element OE can be measured. In the shape measuring apparatus 100, a lifting/driving device 86c disposed in a lifting mechanism 86 has a linear motor, and the thrust occurrence position PP and the center-of-gravity position GC of a lifting member 86b are arranged relatively close to a reference axis line AX1, so that the lifting motion of a probe device 10 in the Z axis direction is smooth, and becomes highly precise without hysteresis. COPYRIGHT: (C)2007,JPO&INPIT
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