Micro-pattern forming apparatus, micro-pattern structure, and method of manufacturing the same

摘要

There is provided a micro-pattern forming apparatus including an electrospraying part for applying a voltage to a solution containing a sample to electrostatically atomizing the solution; a supporting part ( 30 ) for supporting a chip ( 26 ), on which the sample in the solution electrostatically atomized by the electrospraying part, is to be deposited; and a fine mask part ( 24 ) disposed between the electrospraying part and the supporting part, having a mask pattern for being passed through by the electrostatically atomized solution in order to form a micro-pattern of the sample upon the chip, wherein the mask pattern is made from a photoresist material with concavity and convexity on the side of the supporting part.