| 摘要 |
A method for fabricating a semiconductor device includes: forming a gate material over a substrate; etching the gate material to form gate patterns each including a portion of the gate material remaining over the substrate; performing a halo ion-implantation process on a portion of the substrate where a bit line contacts; forming sidewall spacers of the gate patterns; and etching the remaining portion of the gate material to expose the substrate using the sidewall spacers as a mask.
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