| 摘要 |
PROBLEM TO BE SOLVED: To provide a miniaturizable displacement detection device having high reliability even if the displacement detection device is used continuously, and a polarization beam splitter and a diffraction grating to be loaded thereon. SOLUTION: Since a reflection type diffraction grating is used as the diffraction grating 12, each diffracted light generated by the diffraction grating 12 can be returned back, to thereby enable miniaturization of this displacement detection device 1. Since a constitution is adopted, wherein each quarter wave plate 23, 43, 123, 143, and mirrors 24, 44, 124, 144 or the like are provided integrally with a main PBS 22, assembly precision can be kept high, and reliability of the displacement detection device 1 can be secured. COPYRIGHT: (C)2007,JPO&INPIT |
