| 发明名称 |
LOW MICROPIPE 100 MM SILICON CARBIDE WAFER |
| 摘要 |
A high quality single crystal wafer of SiC is disclosed having a diameter of at least about 100mm and a micropipe density of less than about 25 cm-2. |
| 申请公布号 |
KR20070088561(A) |
申请公布日期 |
2007.08.29 |
| 申请号 |
KR20077007642 |
申请日期 |
2007.04.03 |
| 申请人 |
CREE INC. |
发明人 |
POWELL ADRIAN;BRADY MARK;LEONARD ROBERT TYLER |
| 分类号 |
C30B29/36 |
主分类号 |
C30B29/36 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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