LOAD LOCK CHAMBER FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM

摘要

A load lock chamber for a large area substrate processing system is provided to increase throughput and to decrease a substrate contamination due to particles by using substrate transfer chambers which are vertically stacked. A process system includes a transfer chamber which is connected to a factory interface by a load lock chamber(100) having substrate transfer chambers(220,222,224). A dual blade vacuum robot is arranged in the transfer chamber for transferring a substrate between peripheral process chambers and the load lock chamber. The substrate transfer chambers are divided by a vacuum-tight horizontal inner wall(214). Each of the substrate transfer chamber is configured to receive a large area substrate in order to increase a pumping and an exhausting period.