semi-conductor cleaner for using plasma discharging and cleaning method thereof,申请号KR20050080968-传众专利搜索

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发明名称	semi-conductor cleaner for using plasma discharging and cleaning method thereof
摘要
申请公布号	KR100740638(B1)	申请公布日期	2007.07.18
申请号	KR20050080968	申请日期	2005.08.31
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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