发明名称 |
Vertical fuse and method of fabrication |
摘要 |
<p>A fuse for semiconductor devices in accordance with the present invention includes a substrate having a conductive path disposed on a surface thereof, a dielectric layer disposed on the substrate and a vertical fuse disposed perpendicularly to the surface through the dielectric layer and connecting to the conductive path, the vertical fuse forming a cavity having a liner material disposed along vertical surfaces of the cavity, the vertical surfaces being melted to blow the fuse. Methods for fabrication of the vertical fuse are also included. <IMAGE></p> |
申请公布号 |
EP1032039(B1) |
申请公布日期 |
2007.05.02 |
申请号 |
EP20000102357 |
申请日期 |
2000.02.04 |
申请人 |
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
WEBER, STEFAN J.;IGGULDEN, ROY;NARAYAN, CHANDRASEKHAR;BRINTZINGER, AXEL CHRISTOPH;HOINKIS, MARK;VAN DEN BERG, ROBERT |
分类号 |
H01H85/00;H01L23/525;H01H69/02;H01L21/82 |
主分类号 |
H01H85/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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