发明名称 MECHANISM TO PREVENT SELF-ACTUATION IN A MICROELECTROMECHANICAL SWITCH AND METHOD
摘要 According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a bottom electrode mounted on the substrate, a top electrode mounted on the bottom electrode, an actuation electrode mounted on the substrate and a resistor coupled to the actuation electrode. The resistor prevents self-actuation at the actuation electrode whenever the switch is open.
申请公布号 EP1779401(A1) 申请公布日期 2007.05.02
申请号 EP20050767833 申请日期 2005.06.23
申请人 INTEL CORPORATION 发明人 CHOU, TSUNG-KUAN, ALLEN
分类号 H01H59/00;H01P1/10 主分类号 H01H59/00
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