INTEGRATED ETCHED MULTILAYER GRATING BASED WAVELENGTH DEMULTIPLEXER

摘要

An integrated etched multilayer grating-based wavelength multiplexer / demultiplexer is disclosed wherein an etched multilayer grating structure is monolithically integrated within the optical waveguide stack of the multiplexer / demultiplexer to reflectively diffract an input optical beam. The multilayer grating structure is generall y comprised of a series of etched diffractive elements and an etched multilayer reflector, the combined optical response of which providing the desired multiplexing / demultiplexin g effect. The etched structures are generally comprised of shallow etch structures in a to p surface of the multiplexer / demultiplexer waveguide stack. Monolithically integrated input and output ridge waveguides may also be provided, optionally fabricated in a sam e etching step as the etched multilayer grating.