发明名称 POSITIONING METHOD AND POSITIONING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To detect an edge of a photographed object more precisely without being influenced by disturbances. <P>SOLUTION: The image processing method for processing images obtained from a plurality of pixels arranged two-dimensionally so as to pick up an image of an area including the edge of a target object comprises: first steps (S13, S14) for adding accumulatively pixel information related to the pixels arranged in a first direction to be one of the arrangement directions of the pixels to obtain one-dimensional information in a second direction to be another arrangement direction of the pixels; a second step (S15) for obtaining differential information which has differentiated the one-dimensional information; and a third step (S16) for determining an edge position of the target object on the basis of the differential information. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007102580(A) 申请公布日期 2007.04.19
申请号 JP20050292866 申请日期 2005.10.05
申请人 NIKON CORP 发明人 MIMURA MASABUMI;SUGIHARA TARO
分类号 G06T7/60;G06T1/00;H01L21/027 主分类号 G06T7/60
代理机构 代理人
主权项
地址