| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving method for reducing a frictional resistance in an electrostatic actuator having a movable element disposed on a four-phase stator. SOLUTION: In figure (A), a charge having a polarity opposite to the stator is charged in a resistor layer of the movable element 9 when a drive pattern (+, +, -, -) is applied to every four electrodes of the stator 1 from the left. In figure (B), an upward coulomb force is applied to the movable element 9 so as to leave the stator 1, and the frictional resistance is reduced when the drive pattern (-, 0, +, 0) is applied to the electrodes of the stator 1. As shown in figure (B), a rightward drive force is generated by impairing a balance of the coulomb force between the stator 1 and the movable element 9. In figure (C), the movable element 9 rightwardly moves by 1.5 pitch. In figure (D), a force for leftwardly returning the movable element 9 by 0.5 pitch is applied, and the movable element 9 is moved to a position shown in figure (E) and recharged when the pattern (-, +, +, -) rightwardly shifted from the pattern in figure (A) by 1 pitch is applied to the electrodes of the stator 1. COPYRIGHT: (C)2007,JPO&INPIT
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