| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film device capable of simultaneously realizing both of miniaturization of a device size and ensurance of operation performance. SOLUTION: The thin film device 10 is constructed such that a magnetic film 12 is accommodated in a recess 11S in a thickness direction provided in a coil 11. The total thickness H10 becomes equal to a target thickness H0 even when the magnetic film 12 is provided on the coil 11 (H10=H0), so that device thickness is made thin. Further, high frequency resistance is reduced also when the recess 11S is provided in the coil 11 so that operation performance is also ensured. Accordingly, there are ensured both of miniaturization and of a device size and operation performance. COPYRIGHT: (C)2007,JPO&INPIT
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