| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination of a tube due to an oil content and to allow evacuation and gas filling of the tube to be carried out at desired timing. SOLUTION: This manufacturing device of a tube is provided with a plurality of heads 26 interlocked with the tube, vacuum pumps 10a and 10b for continuously evacuate the tube, and gas supply sources 10c-10e for continuously filling the tube with gas. The heads 26, the vacuum pumps and the gas supply sources are connected to one another through rotary joints 2; each rotary joint 2 has a fixed member 4 and a rotating member 6; and the rotating member rotates together with each head. The rotary joint continuously connects the vacuum pump to the head and continuously connects the gas source to the head. Control valves 34a and 34b of each head 26 open and close between the vacuum pump and the tube and control valves 34c-34e of each head open and close between the gas supply source and the tube. COPYRIGHT: (C)2007,JPO&INPIT
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