SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent a substrate holder from being toppled or damaged by such an external impact due to an earthquake or the like as to act on the substrate holder, while a device for exchanging the substrate holder transports the substrate holder or transfers the substrate holder. SOLUTION: The substrate treatment apparatus comprises: a mounting section which mounts a substrate holder 13 and moves it in a substrate treatment chamber; a first toppling prevention mechanism for preventing the mounted substrate holder 13 from being toppled; a substrate holder movement mechanism 14 for moving the substrate holder 13 from the mounting section; a second toppling prevention mechanism for preventing the substrate holder 13 from being toppled by the substrate holder movement mechanism 14; and a toppling prevention control section for controlling the engagement and disengagement of the first and second toppling prevention mechanisms. The toppling prevention control section controls the first and second toppling prevention mechanisms so that at least one of them is engaged with the substrate holder and prevents the substrate holder from being toppled, while the substrate holder is delivered to the mounting section from the substrate holder movement mechanism or vice versa. COPYRIGHT: (C)2007,JPO&INPIT