| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent corrosion-resistant member sufficiently exhibiting corrosion resistances such as acid resistance, alkaline resistance and chemical resistance original in an amorphous carbon. SOLUTION: The corrosion-resistant member 3 is composed of a base material 1, and a corrosion-resistant coating film 2 fixed to a surface of the base material 1 and made of amorphous carbon in which the area ratio of a plurality of defects A penetrating in the thickness direction is≤10<SP>-2</SP>%. The electric resistivity of the corrosion-resistant member 3 is≥10<SP>8</SP>Ωcm. Preferably, the corrosion-resistant coating film 2 is highly reliable as the corrosion-resistant member if the area of each defect A is≤100μm<SP>2</SP>. COPYRIGHT: (C)2007,JPO&INPIT
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