| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing microstructure which is capable of forming a microstructure even on a curved surface without passing through a lithography process and is advantageous for equipment cost and mass production, to provide a method of manufacturing die for molding microstructure, to provide a method of manufacturing optical element having microstructure, to provide an optical element having microstructure, and to provide an optical apparatus. <P>SOLUTION: The method of manufacturing a microstructure comprises the following steps (1), (2). Mask forming step (1) comprises: preparing solution by dissolving a mask material and an amphiphilic polymer into a hydrophobic solvent, applying the prepared solution onto a base (substrate 12) and spraying water vapor onto the surface of applied solution to cause dew condensation to occur on the surface; and vaporizing micro water droplets produced by dew condensation to produce honeycomb-like holes and forming a mask 13 of thin film having the honeycomb-like holes on the substrate. Microstructure forming step (2) comprises: etching the substrate by using the mask formed on the substrate; and, thereby, forming the microstructure (cylindrical holes 14) on the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
