| 摘要 |
PROBLEM TO BE SOLVED: To reduce a temperature variation width of circulated liquid caused by variation of heat load of an external device, and to stabilize performances of the external device in a constant-temperature liquid circulating device. SOLUTION: In this constant-temperature liquid circulating device 1 wherein piping 3 for the circulated liquid in the external device 2 is connected with a discharge port 12a and a return port 12b of a pipe conduit 12 for distributing the constant-temperature circulated liquid by a pump 14, a flow rate sensor 15, and temperature sensors 16, 17 detecting a discharge temperature T1 of the circulated liquid from the pipe conduit and a return temperature T2 of the circulated liquid are disposed in the pipe conduit, and a flow rate and the temperature of the circulated liquid are controlled by a controller 18 in accordance with the heat load of the external device obtained on the basis of the outputs of these sensors. The control is corresponding to the heat load by controlling the temperature of circulated liquid when the difference between the discharge temperature and the return temperature is smaller than a set value, and corresponding to the head load by increasing the flow rate of circulated liquid to the piping of the external device in addition to the control of the temperature, when the difference in temperature is more than the set value. COPYRIGHT: (C)2007,JPO&INPIT
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