| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost sensor structure having a more simplified structure, in a semiconductor device and in its manufacturing method, which has a simplified electrode structure and is easily flattened and miniaturized. <P>SOLUTION: The semiconductor device comprises a semiconductor substrate 1; a dielectric layer 3 formed on the surface of the semiconductor substrate 1, and separated to at least two in a trench part 2; and an electrode 4 formed on the separated dielectric layers 3. With such a construction, changes in electric characteristics are ensured between the electrodes 4 also for variations of incident light intensity, gas concentration, temperature, and humidity. The present device can deal with any signal as an inexpensive sensor. <P>COPYRIGHT: (C)2007,JPO&INPIT |
