| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge excitation type excimer laser that improves durability in a counter electrode (main electrode), where discharge causes heavy exhaustion, and can reduce the number of times for exchanging the main electrode. SOLUTION: In the discharge excitation type excimer laser having a pair of counter electrodes, at least one of the counter electrodes is rotatable, and the discharge surface of the counter electrode can be changed. COPYRIGHT: (C)2007,JPO&INPIT |
