PHOTONIC CRYSTAL AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photonic crystal having high reflectance to visible rays with a structure in which absorption of visible rays by Si is suppressed and Si films and SiO2films are alternately laminated. SOLUTION: In the photonic crystal 1 having a laminated structure in which a plurality of pairs of an Si film 3 and an SiO2film 2 are cyclicly laminated, the Si film 3 has the extinction coefficient in visible rays range of which the wavelength is from 480 to 800 nm is smaller than the extinction coefficient of a bulk Si single crystal. COPYRIGHT: (C)2007,JPO&INPIT