| 摘要 |
PROBLEM TO BE SOLVED: To provide a squeeze air bearing in which the force of constraining air when flowing in and out is strengthened to improve the floating rigidity of a float, and to provide a squeeze film generating method. SOLUTION: The squeeze air bearing comprises a vibration element 4, a vibrator 1 mounted at one single end of the vibration element 4, a movable body 7 having a table 6 mounted at the single end of the vibration element 4 opposite to the vibrator 1, and a fixed part 5 provided at the lower part of the movable body 7. It uses a guide 8 mounted on the whole periphery of the table 6 to encircle the vibrator 1 and an air shielding film 9 mounted on the whole peripheries of the vibrator 1 and the guide 8 for strengthening the force of constraining air when flowing in and out between the vibrator 1 and the fixed part 7 to improve the floating rigidity of the float. COPYRIGHT: (C)2007,JPO&INPIT
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