WAFER CARRIER DOOR,申请号WO2004US37163-传众专利搜索

发明名称	WAFER CARRIER DOOR
摘要	A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
申请公布号	WO2005048306(A3)	申请公布日期	2007.04.19
申请号	WO2004US37163	申请日期	2004.11.08
申请人	ENTEGRIS, INC.;BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFREY, J.;FORBES, MARTIN, L.;SMITH, MARK, V.	发明人	BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFREY, J.;FORBES, MARTIN, L.;SMITH, MARK, V.
分类号	B65D85/90;A47G19/08;B08B3/00;B08B3/02;B08B9/00;B08B9/093;H01L	主分类号	B65D85/90
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